Personally, I would prefer the semi-detached house with penthouse apartment solution, although I cannot estimate the effort required for an elevator for only one apartment. If it should not be a flat roof, a penthouse apartment with a beautiful roof terrace would also be possible.
Alternatively, I could imagine a layout like in the sketch (the window arrangement would of course have to be different). The semi-detached house would then only have living/dining room and kitchen on the ground floor.
Would it be an alternative to the underground garage to build 6 garages on the street side of the property? Probably it doesn't take up more space than an underground garage entrance about 25x4m long (both about 100m2) and it gives your property privacy towards the street.