I had planned to wait for our architect, but that's easier said than done...
Using the space to the left of the stairs is somehow tricky. Too small for a normal room, too extravagantly large for the children's bathroom. The stairs at the bottom in this variant are now narrower and shifted a little to the right (the ground floor would allow that). Then you could accommodate a children's room there.
Of course, the hallway here would seem significantly less open, the window facing west would be gone. Maybe you could still get light through skylights in the bathroom doors.
The south-facing location of the bedroom now is naturally rather suboptimal; a children's room would certainly benefit more from that location. The space in the master bathroom is now, of course, luxurious; you could even fit a sauna in here.
Alternatively, you could move the children's bathroom to the right, and then extend the hallway northwards up to a window.
(Addendum: Yes, I know, the architect's design for the upper floor looks much better. However, the small master bathroom really bothers me. :D)
