The vapor barrier is generally only necessary if you use materials that soften, such as wood (including the HDF carrier board). According to the flooring suppliers, it is also only necessary if the screed is new and still contains residual moisture. At the spots where you damaged the vapor foil, you could have simply repaired it with suitable tape.
You have glued the individual vapor barrier sheets together anyway, so that a sealed surface was created in the room, or you let them overlap by 5-10 cm? (if not, you would have to do it all over again anyway)
If it is now too late and you have holes in it, the question is:
- how moist is the screed still?
- how big are the holes?
Assume that this moisture wants to escape, and it will. Instead of escaping through the edges, now a lot of moisture passes through the holes. The bigger the hole, the greater the amount of moisture.
Is that enough for the wood to absorb the moisture and possibly start to warp?
If you leave it to chance, you might only notice this after a few weeks or months.
Then you would have to take everything up again to fix it anyway.
If you want to be sure, you have to take everything up now, with the difference that no furniture is on it yet.
I am not an expert, but if the holes are rather in the range of 1-2 mm in size and there are no more than 5 holes in the room, I would take the risk. But if you worked very roughly and already caused more damage, I would consult a professional.
If your screed was poured only 3-6 weeks ago... I would measure the current residual moisture again with a proper device, post the moisture level here, and possibly still ask a professional.