I read hints of the desire to build very ecologically...
In that regard, I can understand the OP. We wanted that too, but you have to make compromises. For my floor structure, it was mineral wool in the end. I could certainly have used wood fiber insulation boards like on the walls and roof, but here the flexibility of the material spoke for itself (we have all kinds of lines like controlled residential ventilation, water, electricity, etc. in the floor). So: I have my floor structure almost exactly as the OP outlined it. However, we have waterproof concrete as the slab, insulated underneath with 12cm XPS, and the entire slab was fully sealed on top; our shell builder insisted on that. Maybe one more recommendation: If you're already using cross battens, then insulate crosswise in two layers to avoid thermal bridges.